000			01713cam a2200385 a 4500
005			20250930114049.0
008			020903s1987 xxua b 101 0 eng
010			_a87-014573
020			_a0841214069 _cRM462.30
039		9	_a200210071210 _bjamil _c200210071149 _djamil _y09-03-2002 _zzakir
090			_aTK7871.15.P6P624
090			_aTK7871.15
245	0	0	_aPolymers for high technology : _belectronics and photonics / _cMurrae J. Bowden, editor, S. Richard Turner, editor
246	3	0	_iSpine title : _aPolymers for high techonology
260			_aWashington, DC : _bAmerican Chemical Society, _c1987
300			_ax, 628 p. : _bill. ; _c24 cm.
440		0	_aACS symposium series, _x0097-6156 ; _v346
500			_a'Developed from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986
504			_aIncludes bibliographies and indexes
650		0	_aPolymers _vCongresses
650		0	_aPhotoresists _vCongresses _962545
650		0	_aMicrolithography _xMaterials _vCongresses
650		0	_aMicroelectronics _xMaterials _vCongresses
700	1		_aBowden, M. J., _d1943-
700	1		_aTurner, S. Richard, _d1942-
710	2		_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering _952644
711	2		_aAmerican Chemical Society. _bMeeting _n(192nd : _d1986 : _cAnaheim, Calif.)
907			_a.b13090525 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7871.15.P6P624
914			_avtls000321755
990			_ajj
991			_aProgram Teknologi Kimia dan Oleokimia
998			_al _b2002-03-09 _cm _da _feng _gxxu _y0 _z.b13090525
999			_c308772 _d308772