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090 _aTK7874
100 0 _aUda Hashim
245 1 0 _aPenyediaan dan pencirian C54 TiSi2 untuk proses Silisida litar bersepadu CMOS /
_cUda Hashim
260 _aBangi :
_bFakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
_c2001
300 _axxix , 282 p. :
_bill. ;
_c30 cm.
502 _aTesis (Doktor Falsafah) - Universiti Kebangsaan Malaysia, 2001
504 _aSenarai rukukan : p.260-266
650 0 _aIntegrated circuits
650 0 _aSilicides
650 0 _aSemiconductors
907 _a.b13076024
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_c2019-11-12
942 _c3
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990 _asbs
991 _aKoleksi Arkib
991 _aFakulti Kejuruteraan
998 _at
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_z.b13076024
999 _c307347
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