| 000 | 01377pam a22003734a 4500 | ||
|---|---|---|---|
| 005 | 20250930113913.0 | ||
| 008 | 020724s2002 xxua b 001 0 eng | ||
| 010 | _a2001-043273 | ||
| 020 |
_a0849308267 _cRM400.80 |
||
| 039 | 9 |
_a201412021253 _blatihan _c201310041544 _dlatihan _c200210080948 _dfarid _c200208241150 _dfarid _y07-24-2002 _zsanusi |
|
| 090 | _aTK7836.M329 2002 | ||
| 090 | _aTK7836 | ||
| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 |
_aFundamentals of microfabrication : _bthe science of miniaturization / _cMarc J. Madou |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _c2002 |
||
| 300 |
_a723 p. : _bcol. ill. ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 526 | _aBuku bacaan asas fakulti | ||
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aMachining | |
| 650 | 0 |
_aMicroelectronic packaging _960415 |
|
| 650 | 0 |
_aLasers _xIndustrial applications |
|
| 907 |
_a.b13060454 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7836.M329 2002 |
||
| 914 | _avtls000318537 | ||
| 990 | _afa | ||
| 991 | _aProgram Biologi pemuliharaan & Biologi | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik dan Sistem | ||
| 998 |
_at _b2002-11-07 _cm _da _feng _gxxu _y0 _z.b13060454 |
||
| 999 |
_c305839 _d305839 |
||