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_c200210211212
_dhamudah
_y07-16-2002
_zsanusi
090 _aTJ151.M45
090 _aTJ151
_b.M45 3
245 0 4 _aThe MEMS handbook /
_cedited by Mohamed Gad-el-Hak.
260 _aBoca Raton, FL :
_bCRC Press,
_c2002.
300 _a1 v. (various pagings) :
_bill. ;
_c26 cm.
440 4 _aThe Mechanical engineering handbook series
504 _aIncludes bibliographical references and index.
650 0 _aMechanical engineering
_vHandbooks, manuals, etc.
700 1 _aGad-el-Hak, Mohamed,
_d1945-
907 _a.b13054934
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTJ151.M45
914 _avtls000317947
990 _afa
991 _aKEJ - Pascasiswazah
991 _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem
998 _al
_at
_b2002-03-07
_cm
_da
_feng
_gxxu
_y0
_z.b13054934
999 _c305303
_d305303