000 01194nam a2200313 a 4500
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008 020716s2002 xxua b 001 0 eng
020 _a0849312620 (hc.)
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039 9 _a201212231226
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_zsanusi
040 _dUKM
090 _aTK7875.L988
090 _aTK7875
_b.L988
090 _aTK7875
_b.L988 3
100 1 _aLyshevski, Sergey Edward.
245 1 0 _aMEMS and NEMS :
_bsystems, devices, and structures /
_cSergey Edward Lyshevski.
260 _aBoca Raton, FL :
_bCRC Press,
_c2002.
300 _a461 p. :
_bill. ;
_24 cm.
440 0 _aNano- and microscience, engineering, technology, and medicine series.
504 _aIncludes bibliographical references and index.
650 0 _aMicroelectromechanical systems.
907 _a.b13054818
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.L988
914 _avtls000317935
990 _aza
991 _aPejabat Dekan Fakulti Kejuruteraan - Pascasiswazah
991 _aJabatan Kejuruteraan, Elektrik, Elektronik & Sistem
998 _al
_at
_b2002-03-07
_cm
_da
_feng
_gxxu
_y0
_z.b13054818
999 _c305291
_d305291