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| 005 | 20250914123509.0 | ||
| 008 | 020716s2002 xxua b 001 0 eng | ||
| 020 |
_a0849312620 (hc.) _cRM401.80 |
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| 039 | 9 |
_a201212231226 _bzaina _c200210071454 _dfarid _c200209120949 _dsanusi _c200209120946 _dsanusi _y07-16-2002 _zsanusi |
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| 040 | _dUKM | ||
| 090 | _aTK7875.L988 | ||
| 090 |
_aTK7875 _b.L988 |
||
| 090 |
_aTK7875 _b.L988 3 |
||
| 100 | 1 | _aLyshevski, Sergey Edward. | |
| 245 | 1 | 0 |
_aMEMS and NEMS : _bsystems, devices, and structures / _cSergey Edward Lyshevski. |
| 260 |
_aBoca Raton, FL : _bCRC Press, _c2002. |
||
| 300 |
_a461 p. : _bill. ; _24 cm. |
||
| 440 | 0 | _aNano- and microscience, engineering, technology, and medicine series. | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 907 |
_a.b13054818 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.L988 |
||
| 914 | _avtls000317935 | ||
| 990 | _aza | ||
| 991 | _aPejabat Dekan Fakulti Kejuruteraan - Pascasiswazah | ||
| 991 | _aJabatan Kejuruteraan, Elektrik, Elektronik & Sistem | ||
| 998 |
_al _at _b2002-03-07 _cm _da _feng _gxxu _y0 _z.b13054818 |
||
| 999 |
_c305291 _d305291 |
||