| 000 | 00611nam a2200193 4500 | ||
|---|---|---|---|
| 005 | 20250914090854.0 | ||
| 008 | 991014 00 eng | ||
| 039 | 9 |
_a199910141610 _bstaff _y10-14-1999 _zstaff |
|
| 090 | _aTK7874.N339 1989 | ||
| 090 | _aTK7874 | ||
| 245 |
_aMicroelectronic materials and processes / _acedited by R.A. Levy |
||
| 260 |
_aDordrecht : _bKluwer Academic, _ac1989 |
||
| 700 | _aLevy, R.A. | ||
| 907 |
_a.b12535813 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.N339 1989 |
||
| 914 | _avtls000261488 | ||
| 998 |
_al _b1999-01-10 _cm _da _feng _g _y0 _z.b12535813 |
||
| 999 |
_c254761 _d254761 |
||