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005 20250914084217.0
008 981208s1993 xxk 00 eng
020 _a0412465906
_cRM59.04
039 9 _y08-18-1999
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090 _aQC166
_b.D45
100 1 _aDelchar, T. A.
245 1 0 _aVacuum physics and technology
_cT. A. Delchar
260 _aLondon
_bChapman & Hall
_c1993
300 _a253 p. :
_bill. ;
_c22 cm.
440 _aPhysics and its applications
_v6
650 0 _aVacuum.
650 0 _aVacuum technology.
907 _a.b1243551x
_b2025-02-21
_c2019-11-12
942 _c01
_n0
_kQC166 .D45
914 _avtls000251111
990 _agab
991 _aFakulti Sains Fizik dan Gunaan
998 _at
_b1999-05-08
_cm
_da
_feng
_gxxk
_y0
_z.b1243551x
999 _c244804
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