000 00826nam a2200253 a 4500
005 20250930110238.0
008 981208s1978 us 00 eng d
020 _a0127282505
039 9 _y08-18-1999
_zload
090 _aTK7871.15.F5
_bT43
245 1 0 _aThin film processes /
_cedited by John L. Vossen, Werner Kern.
260 _aNew York :
_bAcademic Press,
_c1978.
300 _axi, 564 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aThin films.
700 1 _aVossen, John L.
700 1 _aKern, Werner,
_d1925-
_939128
907 _a.b12343651
_b2024-07-02
_c2019-11-12
942 _c01
_n0
_kTK7871.15.F5 T43
914 _avtls000241722
991 _aF S Kemasyarakatan dan Kemanusiaan
998 _at
_b1999-05-08
_cm
_da
_feng
_g
_y0
_z.b12343651
999 _c235684
_d235684