| 000 | 01127nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250914080151.0 | ||
| 008 | 981208c19819999gw 00 eng d | ||
| 039 | 9 |
_y08-18-1999 _zload |
|
| 090 |
_aQC176.8.S72 _bS68 |
||
| 245 | 0 | 0 |
_aSputtering by particle bombardment / _cedited by R. Behrisch with contributions by H.H. Anderson ... [et al.]. |
| 260 |
_aBerlin : _bSpringer-Verlag, _c1981. |
||
| 300 |
_av. : _bill. ; _c23 cm. |
||
| 490 | 0 |
_aTopics in applied physics ; _vv. 47 |
|
| 504 | _aIncludes index. | ||
| 504 | _aBibliography: v.1, p.254-256. | ||
| 505 | 0 | _aContents: 1. Physics and applications. | |
| 650 | 0 | _aSputtering (Physics). | |
| 650 | 0 |
_aSolids _xEffect of radiation on. |
|
| 650 | 0 |
_aSurfaces (Physics) _xEffect of radiation on. |
|
| 700 | 1 |
_aBehrisch, R. _q(Rainer). |
|
| 700 | 1 |
_aAndersen, H. H. _q(Hans Henrik). |
|
| 740 | 0 | _aParticle bombardment. | |
| 907 |
_a.b12191176 _b2023-06-21 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kQC176.8.S72 S68 |
||
| 914 | _avtls000226173 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_at _b1999-05-08 _cm _da _feng _ggw _y0 _z.b12191176 |
||
| 999 |
_c220553 _d220553 |
||