| 000 | 00700nam a2200217 a 4500 | ||
|---|---|---|---|
| 008 | 981208s1988 xxua 00 eng d | ||
| 020 | _a0306421852 | ||
| 040 | _aUKM | ||
| 090 |
_aTK7871.85 _b.M583 |
||
| 100 | 1 | _aMoreau, Wayne M. | |
| 245 | 1 | 0 |
_aSemiconductor lithography: _bprinciples, practices, and materials / _cWayne M. Moreau. |
| 260 |
_aNew York: _bPlenum Press, _c1988. |
||
| 300 |
_a931 p. : _bill. ; _c26 cm. |
||
| 650 | 0 | _a Semiconductors. | |
| 650 | 0 | _a Photoesists. | |
| 907 |
_a.b12092927 _b2022-10-31 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85 .M583 |
||
| 914 | _avtls000216157 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b12092927 |
||
| 999 |
_c210791 _d210791 |
||