000			01395nam a2200301 a 4500
008			981208s1994 xxua 00 eng d
020			_a0841227217
040			_aUKM
090			_aTK7871.15 _b.P6P628
245	1	0	_aPolymers for microelectronics : _bresists and dielectrics / _cLarry F. Thompson, C. Grant Willson, Seiichi Tagawa.
260			_aWashington, D.C. _bAmerican Chemical Society _c1994.
300			_a517 p. : _bill. ; _c24 cm.
490			_aACS symposium series _x0097-6156 _v537.
500			_a'Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, Calif., April 5-10, 1992'.
650			_aMicroelectronic _xMaterials _xCongresses.
650			_aPolymers.
700	1		_aThompson, L. F. (Larry F.), 1944-
700	1		_aWillson, C. Grant, 1938-
700	1		_aTagawa, Seiichi.
711	2		_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering
711	2		_aAmerican Chemical Society. _bMeeting _n(203th : _d1992 : _cSan Francisco, Calif.)
907			_a.b11818724 _b2021-11-01 _c2019-11-12
942			_c01 _n0 _kTK7871.15 .P6P628
914			_avtls000188186
990			_agab
991			_aFakulti Sains Fizik dan Gunaan
998			_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11818724
999			_c183475 _d183475