| 000 | 00936nam a2200253 a 4500 | ||
|---|---|---|---|
| 008 | 981208s1994 xxua 00 eng d | ||
| 020 |
_a0841230552 _cRM289.19 |
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| 040 | _aUKM | ||
| 090 |
_aTK7871.15 _b.P6P59 |
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| 245 | 1 | 0 |
_aPolymeric materials for microelectronic applications : _bscience and technology / _ceditors: Hiroshi Ito, Seiichi Tagawa and Kazuyuki Horie |
| 260 |
_aWashington, D.C. : _bAmerican Chemical Society, _c1994 |
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| 300 |
_a468 p. : _bill. ; _c23cm. |
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| 490 |
_aACS symposium series _v579 |
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| 650 |
_aMicroelectronics _xMateriaks _xCongresses. |
||
| 650 |
_aPolymers _xCongresses. |
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| 700 | 1 | _aIto, Hiroshi. | |
| 700 | 1 | _aTagawa, Seiichi. | |
| 700 | 1 | _aHorie, Shigeo, 1903- | |
| 907 |
_a.b11818499 _b2021-10-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7871.15 .P6P59 |
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| 914 | _avtls000188161 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11818499 |
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| 999 |
_c183452 _d183452 |
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