| 000 | 00862nam a2200229 a 4500 | ||
|---|---|---|---|
| 008 | 981208s1991 xxu 00 eng | ||
| 020 | _a0309045975 | ||
| 040 | _aUKM | ||
| 090 |
_aTA2020 _b.P53 3 |
||
| 245 | 1 | 0 |
_aPlasma processing of materials : _bscientific opportunities and technological challenges / _cPanel on Plasma Processing of Materials, National Research .Council |
| 260 |
_aWashington, D. C. : _bNational Academy Press, _c1991. |
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| 300 |
_a75 pages ; _b28 cm. |
||
| 650 | 0 | _aPlasma engineering. | |
| 650 | 0 | _aMaterials. | |
| 711 | 2 | _aNational Research Council (U.S.). Panel on Plasma Processing of Materials. | |
| 907 |
_a.b11794938 _b2021-03-26 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTA2020 .P53 3 |
||
| 914 | _avtls000185744 | ||
| 990 | _amur | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11794938 |
||
| 999 |
_c181099 _d181099 |
||