000 00862nam a2200229 a 4500
008 981208s1991 xxu 00 eng
020 _a0309045975
040 _aUKM
090 _aTA2020
_b.P53 3
245 1 0 _aPlasma processing of materials :
_bscientific opportunities and technological challenges /
_cPanel on Plasma Processing of Materials, National Research .Council
260 _aWashington, D. C. :
_bNational Academy Press,
_c1991.
300 _a75 pages ;
_b28 cm.
650 0 _aPlasma engineering.
650 0 _aMaterials.
711 2 _aNational Research Council (U.S.). Panel on Plasma Processing of Materials.
907 _a.b11794938
_b2021-03-26
_c2019-11-12
942 _c01
_n0
_kTA2020 .P53 3
914 _avtls000185744
990 _amur
991 _aFakulti Kejuruteraan
998 _al
_b1999-05-08
_cm
_da
_feng
_gxxu
_y0
_z.b11794938
999 _c181099
_d181099