| 000 | 00914nam a2200301 a 4500 | ||
|---|---|---|---|
| 005 | 20250930103553.0 | ||
| 008 | 981208s1982 us 00 eng d | ||
| 010 | _a82-3835 | ||
| 020 | _a0306408635 | ||
| 035 | _a78022 | ||
| 039 | 9 |
_y08-18-1999 _zload |
|
| 090 |
_aTK7874 _b.B73 |
||
| 100 | 1 | _aBrodie, Ivor | |
| 245 | 1 | 4 |
_aThe physics of microfabrication / _cIvor Brodie and Julius J. Muray |
| 260 |
_aNew York : _bPlenum Press, _c1982 |
||
| 300 |
_axix, 503 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 650 | 0 |
_aThin _xfilm circuits |
|
| 700 | 1 | _aMuray, Julius J. | |
| 907 |
_a.b11777266 _b2021-02-18 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874 .B73 |
||
| 914 | _avtls000183944 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _g _y0 _z.b11777266 |
||
| 999 |
_c179338 _d179338 |
||