000 00837nam a2200265 a 4500
005 20250914064947.0
008 981208s1975 xxu 00 eng
020 _a0070162301
039 9 _y08-18-1999
_zload
090 _aTK7874
_b.D42
100 1 _aDeForest, William S.
245 1 0 _aPhotoresist :
_bmaterials and processes /
_cW. S. DeForest.
260 _aNew York :
_bMcGraw-Hill Book,
_c1975.
300 _axi, 269 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aPhotoresists.
650 0 _aIntegrated circuits.
650 0 _aPrinted circuits.
907 _a.b1176904x
_b2022-01-14
_c2019-11-12
942 _c01
_n0
_kTK7874 .D42
914 _avtls000183104
991 _aFakulti Kejuruteraan
998 _al
_b1999-05-08
_cm
_da
_feng
_gxxu
_y0
_z.b1176904x
999 _c178519
_d178519