000 00897nam a2200253 a 4500
005 20250914013431.0
008 981208s1985 ne 00 eng d
020 _a0444425608
039 9 _a201810020818
_bhayat
_c200107091634
_djoriah
_y08-18-1999
_zload
090 _aTJ223.T7M52
090 _aTJ223.T7
_bM52
245 0 0 _aMicromachining and micropackaging of transducers /
_cClifford D. Fung ... [et al.].
260 _aAmsterdam :
_bElsevier North-Holland,
_c1985.
300 _a244 p. :
_bill. ;
_c25 cm.
440 0 _aStudies in electrical and electronic engineering ;
_vv.20
650 0 _aTransducers
_xDesign and construction.
700 1 _aFung, Clifford D.
907 _a.b1147564x
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTJ223.T7M52
914 _avtls000152972
991 _aFakulti Kejuruteraan
998 _al
_b1999-05-08
_cm
_da
_feng
_gne
_y0
_z.b1147564x
999 _c149234
_d149234