| 000 | 00928nam a2200265 a 4500 | ||
|---|---|---|---|
| 005 | 20250914013431.0 | ||
| 008 | 981208s1986 xxu 00 eng d | ||
| 020 | _a0070193045 | ||
| 039 | 9 |
_a201810020817 _bhayat _c200107061850 _djoriah _y08-18-1999 _zload |
|
| 090 | _aTK7874.E495 | ||
| 090 |
_aTK7874 _b.E495 |
||
| 100 | 0 | _aElliott, David J. | |
| 245 | 1 | 0 |
_aMicrolithography : _bprocess technology for ic fabrication / _cDavid J. Elliott. |
| 260 |
_aNew York : _bMc Graw-Hill Book Company, _c1986. |
||
| 300 |
_a378 p. : _bill. ; _c26 cm. |
||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction. |
|
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aPhoto resists. | |
| 907 |
_a.b11475638 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.E495 |
||
| 914 | _avtls000152971 | ||
| 991 | _aFakulti Sains Matematik | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11475638 |
||
| 999 |
_c149233 _d149233 |
||