| 000 | 01100nam a2200289 a 4500 | ||
|---|---|---|---|
| 005 | 20250930102104.0 | ||
| 008 | 981208s1990 si 00 eng | ||
| 020 | _a9810201370 | ||
| 039 | 9 |
_a201810020817 _bhayat _c200107061848 _djoriah _y08-18-1999 _zload |
|
| 090 | _aTK7874.M494 | ||
| 090 |
_aTK7874 _b.M494 |
||
| 245 | 0 | 0 |
_aMicrolithography : _bhigh integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 / _ceditors, Aldo Craievich, G. Gerson Bezerra de Souza, Victor Baranauskas. |
| 260 |
_aSingapore : _bWorld Scientific, _c1990. |
||
| 300 |
_a184 p. ; _c26 cm. |
||
| 650 | 0 |
_aMicrolithography _vCongresses. |
|
| 650 | 0 |
_aMicroelectronics _vCongresses. _962721 |
|
| 700 | 1 | _aCraievich, Aldo. | |
| 700 | 1 | _aBezerra, G. Gerson de Souza. | |
| 700 | 1 | _aBaranauskas, Victor. | |
| 907 |
_a.b11475626 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.M494 |
||
| 914 | _avtls000152970 | ||
| 990 | _amur | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gsi _y0 _z.b11475626 |
||
| 999 |
_c149232 _d149232 |
||