000 01100nam a2200289 a 4500
005 20250930102104.0
008 981208s1990 si 00 eng
020 _a9810201370
039 9 _a201810020817
_bhayat
_c200107061848
_djoriah
_y08-18-1999
_zload
090 _aTK7874.M494
090 _aTK7874
_b.M494
245 0 0 _aMicrolithography :
_bhigh integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 /
_ceditors, Aldo Craievich, G. Gerson Bezerra de Souza, Victor Baranauskas.
260 _aSingapore :
_bWorld Scientific,
_c1990.
300 _a184 p. ;
_c26 cm.
650 0 _aMicrolithography
_vCongresses.
650 0 _aMicroelectronics
_vCongresses.
_962721
700 1 _aCraievich, Aldo.
700 1 _aBezerra, G. Gerson de Souza.
700 1 _aBaranauskas, Victor.
907 _a.b11475626
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7874.M494
914 _avtls000152970
990 _amur
991 _aFakulti Sains Fizik dan Gunaan
998 _al
_b1999-05-08
_cm
_da
_feng
_gsi
_y0
_z.b11475626
999 _c149232
_d149232