| 000 | 01054nam a2200289 a 4500 | ||
|---|---|---|---|
| 005 | 20250930102103.0 | ||
| 008 | 981208s1989 xxu 00 eng | ||
| 020 |
_a0841214751 _cRM133.49 |
||
| 039 | 9 |
_a201809191456 _bhayat _c200107061715 _djoriah _y08-18-1999 _zload |
|
| 090 | _aTK7874.M4835 | ||
| 090 |
_aTK7874 _b.M4835 |
||
| 245 | 0 | 0 |
_aMicroelectronics processing : _bchemical engineering aspects / _cDennis W. Hess and Klaus F. Jensen ; editors. |
| 260 |
_aWashington, D.C. : _bAmerican Chemical Society , _c1989. |
||
| 300 |
_a547 p. : _bill. ; _c23 cm. |
||
| 440 | 0 |
_aAdvances in chemistry series ; _vv.221 |
|
| 650 | 0 |
_aMicroelectronics _xMaterials. _960417 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 | _aSurface chemistry. | |
| 700 | 1 | _aHess, Dennis W. | |
| 700 | 1 | _aJensen, Klavs F. | |
| 907 |
_a.b11475249 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.M4835 |
||
| 914 | _avtls000152930 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11475249 |
||
| 999 |
_c149194 _d149194 |
||