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| 005 | 20250914012601.0 | ||
| 008 | 981208s1988 si 00 eng | ||
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_a201804111042 _bbaiti _y08-18-1999 _zload |
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| 040 | _aUKM | ||
| 090 | _aTA401.3.I517 1988 | ||
| 090 |
_aTA401.3 _b.I517 |
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| 111 | 2 | _aInternational Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) | |
| 245 | 1 | 0 |
_aMaterials and process characterization for VSLI, 1988 (ICMPC'88) _bproceedings ... _ceditors X-F Zong, Y-Y Wang, J Chen |
| 260 |
_aSingapore : _bWorld Scientific ; _c1988 |
||
| 300 |
_a531 p. : _bill. ; _c22 cm. |
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| 590 | _a1 | ||
| 650 | _aMaterial | ||
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_a.b11415101 _b2021-05-28 _c2019-11-12 |
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_c01 _n0 _kTA401.3.I517 1988 |
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| 914 | _avtls000146760 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
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_al _b1999-05-08 _cm _da _feng _gsi _y0 _z.b11415101 |
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