| 000 | 01027nam a2200337 a 4500 | ||
|---|---|---|---|
| 005 | 20250930101129.0 | ||
| 008 | 981208s1989 xxk 00 eng | ||
| 010 | _a87-035864 | ||
| 020 | _a0521322545 | ||
| 035 | _a199136 | ||
| 039 | 9 |
_y08-18-1999 _zload |
|
| 090 | _aTK7874.L298 | ||
| 090 | _aTK7874 | ||
| 245 | 1 | 0 |
_aLaser chemical processing for microelectronics _cedited by K.G. Ibbs, R.M. Osgood |
| 260 |
_aCambridge _bCambridge University Press _c1989 |
||
| 300 | _a172 p. : ill. ; 23 cm. | ||
| 440 |
_aCambridge studies in modern optics _v7 |
||
| 590 | _a1 | ||
| 650 |
_aIntegrated circuits _xDesign and construction |
||
| 650 |
_aLasers _xIndustrial applications |
||
| 700 | 1 |
_aIbbs, K. G. _937657 |
|
| 700 | 1 | _aOsgood, R.M. | |
| 907 |
_a.b11276733 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.L298 |
||
| 914 | _avtls000132513 | ||
| 990 | _aru | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxk _y0 _z.b11276733 |
||
| 999 |
_c129409 _d129409 |
||