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| 008 | 981208s1982 gw 00 eng d | ||
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_aIon implantation techniques : _blectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 / _ceditors, H. Rysell and H. Glawischnig. |
| 260 |
_aBerlin : _bSpringer-Verlag, _c1982 |
||
| 300 |
_a372 p. _bill. ; _c23 cm. |
||
| 490 | 1 |
_aSpringer series in electrophysics ; _v10 |
|
| 590 | _a1 | ||
| 650 |
_aIon Implantation _xAddresses, essays, lectures |
||
| 650 |
_aSemiconductor doping _xAddresses, essays, lectures |
||
| 700 | 1 | _aRysell, H. | |
| 700 | 1 | _aGlawisching, H. | |
| 830 | 0 |
_aSpringer series in electrophysics ; _v10 |
|
| 907 |
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| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _ggw _y0 _z.b11146539 |
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