000 01300nam a2200337 a 4500
005 20250913134745.0
008 981208s1982 gw 00 eng d
020 _a3540118780
035 _a82484
039 9 _a201406301230
_bjamil
_y08-18-1999
_zload
040 _aUKM
090 _aTK7871.85.I587
090 _aTK7871.85
_b.I587
245 1 0 _aIon implantation techniques :
_blectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 /
_ceditors, H. Rysell and H. Glawischnig.
260 _aBerlin :
_bSpringer-Verlag,
_c1982
300 _a372 p.
_bill. ;
_c23 cm.
490 1 _aSpringer series in electrophysics ;
_v10
590 _a1
650 _aIon Implantation
_xAddresses, essays, lectures
650 _aSemiconductor doping
_xAddresses, essays, lectures
700 1 _aRysell, H.
700 1 _aGlawisching, H.
830 0 _aSpringer series in electrophysics ;
_v10
907 _a.b11146539
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7871.85.I587
914 _avtls000119151
991 _aFakulti Sains Fizik dan Gunaan
998 _al
_b1999-05-08
_cm
_da
_feng
_ggw
_y0
_z.b11146539
999 _c116433
_d116433