| 000 | 01101nam a2200349 a 4500 | ||
|---|---|---|---|
| 005 | 20250913134745.0 | ||
| 008 | 981208s1976 xxk 00 eng | ||
| 020 | _a0126969507 | ||
| 035 | _a599417 | ||
| 039 | 9 |
_a201406301228 _bjamil _y08-18-1999 _zload |
|
| 040 | _aUKM | ||
| 090 | _aQC702.7.I55T67 | ||
| 090 |
_aQC702.7.I5 _bT67 |
||
| 100 | 1 |
_aTownsend, P. D. _q(Peter David) |
|
| 245 | 1 | 0 |
_aIon implantation, sputtering and their applications / _cby P. D. Townsend, J. C. Kelly, N. E. W. Hartley. |
| 260 |
_aLondon : _bAcademic Press, _c1976 |
||
| 300 |
_a333 p. : _bill. ; _c24 cm. |
||
| 504 | _aincludes bibliographical reference | ||
| 590 | _a1 | ||
| 650 | 0 | _aIon implantation. | |
| 650 | 0 | _aSputtering (Physics). | |
| 700 | 1 |
_aKelly, J. C. _q(John Clive). |
|
| 700 | 1 | _aHartley, N. E. W. | |
| 907 |
_a.b11146527 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kQC702.7.I55T67 |
||
| 914 | _avtls000119150 | ||
| 990 | _azry | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_at _b1999-05-08 _cm _da _feng _gxxk _y0 _z.b11146527 |
||
| 999 |
_c116432 _d116432 |
||