| 000 | 01267nam a2200349 a 4500 | ||
|---|---|---|---|
| 005 | 20250913134745.0 | ||
| 008 | 981208s1973 xxua 00 eng | ||
| 020 | _a0306307561 | ||
| 035 | _a475932 | ||
| 039 | 9 |
_a201406301222 _bjamil _c201406301222 _djamil _c201406301221 _djamil _y08-18-1999 _zload |
|
| 040 | _aUKM | ||
| 090 | _aTK7871.85.I578 1972 | ||
| 090 | _aTK7871.85 | ||
| 111 | 0 |
_aInternational Symposium on Ion Implantation Semiconductors and Other Materials _n(3d, : _d1972 : _cYorktown Heights, N.Y.,). |
|
| 245 | 1 | 0 |
_aIon implantation in semiconductors and other materials / _cedited by Billy L. Crowder. |
| 260 |
_aNew York : _bPlenum Press, _c1973 |
||
| 300 |
_axii, 657 p. : _bill. ; _c26 cm. |
||
| 490 | 1 | _aThe IBM research symposia series. | |
| 504 | _aIncludes bibliographical references. | ||
| 590 | _a1 | ||
| 650 | 0 |
_aIon implantation _vCongresses. |
|
| 650 | 0 |
_aSemiconductors _vCongresses. |
|
| 711 | 1 | _aCrowder, Billy L. | |
| 830 | 0 | _aThe IBM research symposia series. | |
| 907 |
_a.b11146503 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.I578 1972 |
||
| 914 | _avtls000119148 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b11146503 |
||
| 999 |
_c116430 _d116430 |
||