| 000 | 01062nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250913134745.0 | ||
| 008 | 981208s1981 nyua 00 eng d | ||
| 020 | _a030665198X | ||
| 035 | _a70850 | ||
| 039 | 9 |
_a201406301216 _bjamil _c201406301215 _djamil _y08-18-1999 _zload |
|
| 090 | _aTK7871.85.A32 zz | ||
| 090 |
_aTK7871.85 _b.A32 |
||
| 100 | 1 | _aAgajanian, A. H. | |
| 245 | 1 | 0 |
_aIon implantation in microelectronics : _ba comprehensive bibliography, _cA.H. Agajanian |
| 260 |
_aNew York : _bIFI/Plenum, _c1981 |
||
| 300 |
_a255 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aComputer science information guides ; _vv.1 |
|
| 590 | _a1 | ||
| 650 | 0 |
_aSemiconductor doping _vBibliography. |
|
| 650 | 0 |
_aIon implantation _vBibliography. |
|
| 907 |
_a.b11146485 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c1 _n0 _kTK7871.85.A32 zz |
||
| 914 | _avtls000119146 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 991 | _aFakulti Teknologi dan Sains Maklumat | ||
| 998 |
_at _b1999-05-08 _cm _da _feng _gnyu _y0 _z.b11146485 |
||
| 999 |
_c116428 _d116428 |
||