000 01013nam a2200325 a 4500
005 20250913134745.0
008 981208s1973 ne 00 eng
020 _a0444104887
035 _a475924
039 9 _a201406301212
_bjamil
_y08-18-1999
_zload
040 _aUKM
090 _aTK7871.85.I586
090 _aTK7871.85.I586
245 1 0 _aIon implantation /
_cby G. Dearnaley ... [et al.].
260 _aAmsterdam :
_bNorth-Holland Publishing Company,
_c1973
300 _axv, 802 p. :
_bill. ;
_c23 cm.
490 1 _aDefects in crystalline solids .
_vvol. 8
504 _aIncludes bibliographies.
590 _a1
650 0 _aIon implantation.
700 1 _aDearnaley, G.
_q(Geoffrey).
830 0 _aDefects in crystalline solids.
_vvol. 8
907 _a.b11146473
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7871.85.I586
914 _avtls000119145
991 _aFakulti Kejuruteraan
998 _al
_b1999-05-08
_cm
_da
_feng
_gne
_y0
_z.b11146473
999 _c116427
_d116427