| 000 | 01292nam a2200325 a 4500 | ||
|---|---|---|---|
| 005 | 20250930100339.0 | ||
| 008 | 981208s1993 xxka b 000 0 eng | ||
| 020 |
_a0412395509 _cRM157.25 |
||
| 039 | 9 |
_a201405160835 _blan _y08-18-1999 _zload |
|
| 040 | _dUKM | ||
| 090 | _aTK7874.I595713 | ||
| 090 |
_aTK7874 _b.I595713 3 |
||
| 245 | 1 | 0 |
_aIntroduction to VLSI process engineering / _cedited by the Society of Chemical Engineers of Japan ; editor in chief, Yuji Naka. |
| 260 |
_aLondon : _bChapman & Hall, _c1993. |
||
| 300 |
_a210 p. : _bill. ; _c24 cm. |
||
| 500 | _a'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso. | ||
| 504 | _aReferences : p. 201-204. | ||
| 546 | _aengjpn | ||
| 650 |
_aIntegrated circuits _xVery larged scale integration _xDesign and construction. |
||
| 650 | _aManufacturing processes. | ||
| 700 | 1 |
_aNaka, Yuji, _d1945- _942457 |
|
| 711 | 2 | _aKagaku Nogaku Kyokai (Japan). | |
| 907 |
_a.b11138580 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.I595713 |
||
| 914 | _avtls000118319 | ||
| 990 | _agab | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxk _y0 _z.b11138580 |
||
| 999 |
_c115638 _d115638 |
||