| 000 | 00929nam a2200289 a 4500 | ||
|---|---|---|---|
| 005 | 20250930100319.0 | ||
| 008 | 981208s1983 xxka 000 0 eng | ||
| 020 | _a0471901482 | ||
| 039 | 9 |
_a201404091151 _blan _c200007291154 _dbedah _y08-18-1999 _zload |
|
| 040 | _dUKM | ||
| 090 | _aTK7874.M654 3 | ||
| 090 |
_aTK7874 _b.M654 3 |
||
| 100 | 1 | _aMorgan, D. V. | |
| 245 | 1 | 3 |
_aAn introduction to semiconductor microtechnology / _cD. V. Morgan, K. Board. |
| 260 |
_aChichester : _bJohn Wiley & Sons, _c1983. |
||
| 300 |
_a167 p. : _bill. ; _c23 cm. |
||
| 500 | _a'A Wiley-Interscience publication.' | ||
| 650 | 0 |
_aMicroelectronics. _960418 |
|
| 650 | 0 | _aSemiconductors. | |
| 700 | 1 | _aBoard, K. | |
| 907 |
_a.b11130295 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.M654 3 |
||
| 914 | _avtls000117456 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxk _y0 _z.b11130295 |
||
| 999 |
_c114812 _d114812 |
||