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_blan
_c201212172049
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_y08-18-1999
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090 _aTK7871.85.I48 3
090 _aTK7871.85
_b.I48
090 _aTK7871.85
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245 0 0 _aImpurity doping processes in silicon /
_cedited by F.F.Y. Wang.
260 _aAmsterdam :
_bNorth-Holland,
_c1981.
300 _a643 p. :
_bill. ;
_c23 cm.
490 1 _aMaterials processing
_btheory and practices
_vvol. 2.
504 _aIncludes bibliographical references.
650 0 _aSemiconductor doping.
700 1 _aWang, F. F. Y.
_q(Franklin F. Y.),
_d1928-
830 0 _aMaterials processing
_btheory and practices
_vvol. 2.
907 _a.b11035468
_b2021-05-28
_c2019-11-12
942 _c01
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_kTK7871.85.I48 3
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991 _aFakulti Sains Fizik dan Gunaan
998 _al
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999 _c105367
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