| 000 | 01025nam a2200265 a 4500 | ||
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| 005 | 20250930095747.0 | ||
| 008 | 981208s1991 nyu 000 0 eng | ||
| 039 | 9 |
_a201301151426 _bzabidah _c200207091108 _dazmi _y08-18-1999 _zload |
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| 090 | _aHD9696.S4I4 | ||
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_aHD9696.S4 _bI4 |
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| 245 | 0 | 0 | _aIEEE transactions on semiconductor manufacturing. |
| 260 |
_aNew York : _bThe Institute of Electrical and Electronics Engineers, _c1991. |
||
| 300 | _a2 v. ; 29 cm. | ||
| 650 | 0 |
_aSemiconductor industry _vPeriodicals. |
|
| 650 | 0 |
_aSemiconductor industrial equipment industry _vPeriodicals. |
|
| 650 | 0 |
_aSemiconductor production equipment industry _vPeriodicals. |
|
| 650 | 0 |
_aSemiconductors _vPeriodicals. |
|
| 710 | 2 |
_aInstitute of Electrical and Electronics Engineers. _938219 |
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| 907 |
_a.b11014192 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kHD9696.S4I4 |
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| 914 | _avtls000105347 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_at _b1999-05-08 _cm _da _feng _gnyu _y0 _z.b11014192 |
||
| 999 |
_c103243 _d103243 |
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