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	1.	Glow discharge processes : sputtering and plasma etching / Brian Chapman by Chapman, Brian NPlasma etching Publication details: New York : Wiley, 1980 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: QC702.7.P6C48. Place hold
	2.	Ion bombardment modification of surfaces : fundamentals and applications / edited by Orlando Auciello and Roger Kelly. by Auciello, Orlando, 1945- Kelly, Roger Series: Beam modification of materials ; 1 Publication details: Amsterdam : Elsevier North-Holland, 1984 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TA418.7.I65 1984. Place hold
	3.	Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. by Townsend, P. D. (Peter David) Kelly, J. C. (John Clive) Hartley, N. E. W Publication details: London : Academic Press, 1976 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: QC702.7.I55T67. Place hold
	4.	No cover image available Sputtering by particle bombardment / edited by R. Behrisch with contributions by H.H. Anderson ... [et al.]. by Behrisch, R. (Rainer) Andersen, H. H. (Hans Henrik) Series: Topics in applied physics ; v. 47 Publication details: Berlin : Springer-Verlag, 1981 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: QC176.8.S72 S68. Place hold
	5.	Sputtering by Particle Bombardment [electronic resource] : Experiments and Computer Calculations from Threshold to MeV Energies / edited by Rainer Behrisch, Wolfgang Eckstein. by Behrisch, Rainer Eckstein, Wolfgang SpringerLink (Online service) Series: Topics in Applied Physics ; 110 Publication details: Berlin Heidelberg : Springer-Verlag GmbH., 2007 In: Springer e-books Online resources: Click here to access online Availability: No items available.
	6.	Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. by Sarkar, Jaydeep (Materials scientist) [author.] Publisher: Waltham, USA : Elsevier, WA, William Andrew is an imprint of Elsevier, 2014 Availability: No items available.
	7.	Thin film processing and characterization of high-temperature superconductors, Anaheim, CA. 1987 / edited by James M. E. Harper, Richard J. Calton, Leonard L. Peldman. by Harper, James M. E Series: American Institute of Physics Conference proceedings Publication details: New York : American Institute of Physics, 1988 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: QC611.9 .T47. Place hold

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