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Electroceramic-Based MEMS [electronic resource] : Fabrication-Technology and Applications / edited by Nava Setter.

Contributor(s): Series: Electronic Materials: Science and Technology ; 9Publication details: Boston, MA : Springer Science+Business Media, Inc., 2005.Description: xii, 414 p. : ill., digital ; 25 cmISBN:
  • 9780387233192 (electronic bk.)
  • 9780387233109 (paper)
Subject(s): DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .E42 2005
Online resources: In: Springer e-books
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