TY  - BOOK
AU  - El-Kareh,Badih
TI  - Fundamentals of semiconductor processing technology
SN  - 0792395344
PY  - 1995///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Semiconductors
KW  - Design and construction
KW  - Manufacturing processes
N1  - Cover title: Fundamentals of semiconductor processing technologies
ER  -