El-Kareh, Badih <br/><br/>
Fundamentals of semiconductor processing technology / 
by Badih El-kareh ; graphics and layout: Richard J. Bombard 
 - Boston :  Kluwer Academic Publishers,  1995 
 - 599 p. :  ill. ;  25 cm. 
<br/><br/> Cover title: Fundamentals of semiconductor processing technologies 
<br/><br/><label>ISBN: </label>0792395344  RM354.90 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Manufacturing processes