TY  - BOOK
AU  - Newman,Roger
TI  - Fine line lithography
SN  - 0444853510
PY  - 1980///
CY  - Amsterdam
PB  - North-Holland Publishing Company
KW  - Integrated circuits
KW  - Large scale integration
KW  - Lithography
N1  - Includes bibliographical references (p.477-478) and index
ER  -