Fine line lithography / 
edited by Roger Newman 
 - Amsterdam :  North-Holland Publishing Company,  1980 
 - 481 p. :  ill. ;  24 cm. 
 - Materials processing, theory and practices ;  vol. 1 .
<br/><br/>Includes bibliographical references (p.477-478) and index 
<br/><br/><label>ISBN: </label>0444853510 
<br/><br/><label>LCCN: </label>80-13154 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Large scale integration<br/>Lithography