TY  - BOOK
AU  - Baliga,B.Jayant
TI  - Epitaxial silicon technology
SN  - 0120771209
PY  - 1986///
CY  - Orlando, Fla.
PB  - Academic Press
KW  - Smiconductors
KW  - Design and construction
KW  - Silicon crystals
KW  - Growth
KW  - Epitaxy
N1  - Includes bibliographies and index; Silicon vapor phase epitaxy/H.M. Liaw and J.W. Rose. Silicon molecular beam epitaxy/B. Jayant Baliga. [et al.]
ER  -