Epitaxial silicon technology / 
edited by B. Jayant Baliga 
 - Orlando, Fla. :  Academic Press,  1986 
 - 328 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographies and index 
<br/><br/>Silicon vapor phase epitaxy/H.M. Liaw and J.W. Rose. Silicon molecular beam epitaxy/B. Jayant Baliga. [et al.] 
<br/><br/><label>ISBN: </label>0120771209 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Smiconductors--Design and construction<br/>Silicon crystals--Growth<br/>Epitaxy