TY  - BOOK
AU  - Grayson,Martin
TI  - Encyclopedia of semiconductor technology
SN  - 0471881023
PY  - 1984///
CY  - New York
PB  - Wiley
KW  - Semiconductors
KW  - Addresses, essays, lectures
N1  - Articles reprinted from the Kirk-Othmer Encyclopedia of chemical technology; Includes bibliographical references and index
ER  -