Functional thin films and nanostructures for sensors synthesis, physics and applications - Zribi, Anis.; Fortin, Jeffrey; SpringerLink (Online service) (Boston, MA : Springer-Verlag US, 2009)
Keywords: Thin film devices; Nanoelectromechanical systems; Detectors; Nanotechnology; Material Science; Characterization and Evaluation of Materials; Electronics and Microelectronics, Instrumentation; Surfaces and Interfaces, Thin Films; Optical and Electronic Materials