El-Kareh, Badih. <br/><br/>
Silicon devices and process integration  deep submicron and nano-scale technologies /  [electronic resource] : 
by Badih El-Kareh. 
 - Boston, MA :  Springer US,  2009. 
 - xxv, 597 pages :  illustrations,digital  ;  24 cm. 
<br/><br/><label>ISBN: </label>9780387690100 9780387367989  RM378.71 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors, Complementary.<br/>Linear integrated circuits--Design.<br/>Electronics and Microelectronics, Instrumentation.<br/>Electrical Engineering.<br/>Materials Science, general.<br/>Circuits and Systems.
<br/><br/><label>Dewey Class. No.: </label>621.3815