TY  - BOOK
AU  - Leondes,Cornelius T.
ED  - SpringerLink (Online service)
TI  - MEMS/NEMS: Handbook Techniques and Applications 
SN  - 9780387257860 (electronic bk.)
AV  - TK153 .M446 2006
U1  - 620.5 22
PY  - 2006///
CY  - Boston, MA
PB  - Springer Science+Business Media, Inc.
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Nanotechnology
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/b136111
ER  -