MEMS/NEMS  Handbook Techniques and Applications /  [electronic resource] : 
edited by Cornelius T. Leondes. 
 - Boston, MA :  Springer Science+Business Media, Inc.,  2006. 
 - v. :  ill., digital ;  25 cm. 
<br/><br/><label>ISBN: </label>9780387257860 (electronic bk.) 9780387245201 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>TK153  / .M446 2006 
<br/><br/><label>Dewey Class. No.: </label>620.5