TY  - BOOK
AU  - Rebeiz,Gabriel M.
TI  - RF MEMS: theory, design and technology 
SN  - 9788126525805
PY  - 2003///
CY  - India
PB  - Wiley India
KW  - Microelectromechanical systems
KW  - Integrated circuits
KW  - Design and construction
KW  - Microwave devices
KW  - Radio frequency
ER  -