TY  - BOOK
AU  - Thong,John T.L.
TI  - Electron beam testing technology
SN  - 0306443600
PY  - 1993///
CY  - New York
PB  - Plenum Press
KW  - Semiconductors
KW  - Testing
KW  - Electron beams
KW  - Industrial applications
KW  - Scanning electron microscopes
N1  - Includes bibliographical references and index
ER  -