Piezoresistive microcantilever biosensor fabrication process development /
Badariah Bais, Burhanuddin Yeop Majlis, Rosminazuin Ab. Rahim.
- 242 pages : illustrations ; 23 cm.
Includes bibliographical references (pages [225]-236) and index.
Microsensors in biosensing -- Microcantilever biosensor -- Technology and theory -- Design and simulation -- Fabrication process development -- Performance and functionality -- Way forward.