Badariah Bais,

Piezoresistive microcantilever biosensor fabrication process development / Badariah Bais, Burhanuddin Yeop Majlis, Rosminazuin Ab. Rahim. - 242 pages : illustrations ; 23 cm.

Includes bibliographical references (pages [225]-236) and index.

Microsensors in biosensing -- Microcantilever biosensor -- Technology and theory -- Design and simulation -- Fabrication process development -- Performance and functionality -- Way forward.

9789672517795


Biosensors.
Biosensor industry.
Microfabrication.