TY  - BOOK
AU  - Burhanuddin Yeop Majlis,
TI  - Sensor dan aktuator MEMS perkembangan & kegunaan
SN  - 9789674126681
PY  - 2018///
CY  - Bangi, Selangor
PB  - Penerbit Universiti Kebangsaan Malaysia
KW  - Microelectromechanical systems
KW  - Actuators
KW  - Detectors
N1  - Includes bibliographical references : pages [269]-283) and index
ER  -