TY  - BOOK
AU  - Pal,Prem,e author
AU  - Sato,Kazuo
TI  - Silicon wet bulk micromachining for MEMS
SN  - 9789814613729
PY  - 2017///]
CY  - Pan Stanford
PB  - Singapore
KW  - Microelectromechanical systems
KW  - Micromachining
N1  - Includes bibliogarphical references and index
ER  -