Dry etching for microelectronics / 
edited by Ronald A. Powell. 
 - Amsterdam :  North-Holland Publishing Company,  1984. 
 - 299 p. :  ill. ;  24 cm. 
 - Materials processing theory and practices ;  v.4. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0444869050 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching.<br/>Plasma etching.