TY  - BOOK
AU  - Castaner,Luis
TI  - Understanding MEMS: principles and applications 
SN  - 9781119055426
PY  - 2015///
CY  - Hoboken, New Jersey
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication
ER  -